1.5–5.0 kW — SDS 5000/6000 Series
Microwave Plasma CVD Systems

Diamond CVD systems of choice for R&D, in use around the world

This series of advanced diamond CVD systems provides many important features and advantages…

• Low- to high-power density plasma for accelerated diamond CVD growth rates
• Flexible configurations for demanding polydiamond and single crystal processes
• Stainless, cold-wall chamber
• Heated and/or cooled stage
• Multiple ports for plasma viewing and in-situ diagnostics, load-lock capable
• Range of models available for recipe-driven computer control and manual operation

Applications

• High-power density plasmas — accelerated growth rates
• Optical grade, highest quality microcrystalline diamond (2” diameter)
• Various thermal grade, high growth rate microcrystalline diamond (2” diameter)
• Single-crystal diamond — high growth rate and device quality

 

The Seki Diamond SDS 5000/6000 Series is a high-performance family of high-reliability, high-repeatability diamond CVD systems that provides a range of capabilities to fit your needs:

• SDS 5200M — 1.5kW, heated stage, with manual control
• SDS 5250M — 5.0kW, cooled stage, with manual control
• SDS 6300 — 1.5kW, heated stage, computer recipe operation w/ data logging
• SDS 6350 — 5.0kW, cooled stage, computer recipe operation w/ data logging (5-port)
• SDS 6370 — 5.0kW, cooled stage, computer recipe operation w/ data logging (7-port)

 

For detailed product information and suggested configurations/options related to specific diamond CVD systems and applications please contact us.