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1.5–5.0 kW — SDS 5000/6000 Series
Microwave Plasma CVD Systems

Diamond CVD systems of choice for R&D, in use around the world

 

This series of advanced diamond CVD systems provides many important features and advantages…

  • Low- to high-power density plasma for accelerated diamond CVD growth rates
  • Flexible configurations for demanding polydiamond and single crystal processes
  • Stainless, cold-wall chamber
  • Heated and/or cooled stage
  • Multiple ports for plasma viewing and in-situ diagnostics, load-lock capable
  • Range of models available for recipe-driven computer control and manual operation

 

Applications

  • High-power density plasmas — accelerated growth rates
  • Optical grade, highest quality microcrystalline diamond (2” diameter)
  • Various thermal grade, high growth rate microcrystalline diamond (2” diameter)
  • Single-crystal diamond — high growth rate and device quality

 

The Seki Diamond SDS 5000/6000 Series is a high-performance family of high-reliability, high-repeatability diamond CVD systems that provides a range of capabilities to fit your needs:

  • SDS 5200S — 1.5kW, heated stage, touch-panel GUI with manual control
  • SDS 5250S — 5.0kW, cooled stage, touch-panel GUI with manual control
  • SDS 6300 — 1.5kW, heated stage, computer recipe operation with data logging
  • SDS 6350 — 5.0kW, cooled stage, computer recipe operation with data logging

 

For detailed product information and suggested configurations/options related to specific diamond CVD systems and applications please contact us.